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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
元智大學 2018 利用噴射式大氣電漿束進行三氟甲烷電漿對單晶矽蝕刻 宋俞靜; Yu-Ching Sung
元智大學 2017-08-23 三氟甲烷與四氟化碳大氣電漿束蝕刻矽晶圓之研究 宋俞靜; Chun Huang

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