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國立交通大學 2014-12-12T02:20:10Z 化學氣相沉積介電薄膜特性對CMP技術與記憶體元件應用之影響研究 林啟發; Chi-fa Lin; 馮 明憲; 曾 偉 志; Ming-Shiann Feng; Wei Tsi Tseng

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