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"翁士元"

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Institution Date Title Author
國立交通大學 2014-12-12T02:13:37Z 活性離子蝕刻與電子迴旋共振蝕刻在矽基材上所造成的蝕刻破壞之研究 翁士元; Shih-Yuan Ueng; 鄭晃忠; Huang-Chung Cheng

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