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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
臺大學術典藏 2021-08-05T02:41:49Z Device pattern impact on optical endpoint detection by interferometry for STI CMP Bourzgui S;Roussy A;Blue J;Georges G;Faivre E;Labory K;Allard A.; Bourzgui S; Roussy A; Blue J; Georges G; Faivre E; Labory K; Allard A.; JAKEY BLUE
臺大學術典藏 2021-08-05T02:41:49Z Device pattern impact on optical endpoint detection by interferometry for STI CMP Bourzgui S;Roussy A;Blue J;Georges G;Faivre E;Labory K;Allard A.; Bourzgui S; Roussy A; Blue J; Georges G; Faivre E; Labory K; Allard A.; JAKEY BLUE

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