臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
臺大學術典藏	2018-09-10T06:35:26Z	Real-time spatial control of photoresist development rate	Arthur Tay; Weng-Khuen Ho; Ni Hu; Choon-Meng Kiew; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:02:39Z	A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithography	Ni Hu; Arthur Tay; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:02:39Z	Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography	Arthur Tay; Weng-Khuen Ho; Ni Hu; Kuen-Yu Tsai; Ying Zhou; KUEN-YU TSAI
臺大學術典藏	2018-09-10T06:02:39Z	Feedback control of piezo-based nanopositioning systems for semiconductor manufacturing	Kuen-Yu Tsai; Jia-Yush Yen; Arthur Tay; Jyh-Fa Lee; KUEN-YU TSAI; Yea-Chin Yeh; Chun-Hung Liu
臺大學術典藏	2018-09-10T05:27:09Z	In-situ fault detection of wafer warpage in lithography	Arthur Tay; Weng Khuen Ho; Christopher Yap; Chen Wei; Kuen-Yu Tsai; KUEN-YU TSAI

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