臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
臺大學術典藏	2022-08-09T03:50:32Z	5 nm ruthenium thin film as a directly plateable copper diffusion barrier	Arunagiri T.N.; Zhang Y.; Chyan O.; El-Bouanani M.; Kim M.J.; Chen K.H.; Wu C.T.; Chen L.C.; Arunagiri T.N.; Zhang Y.; Chyan O.; El-Bouanani M.; Kim M.J.; Chen K.H.; Wu C.T.; Chen L.C.; LI-CHYONG CHEN
國立臺灣大學	2005-01	A 5 nm Ruthenium Thin Film as a Directly Plate-able Copper Diffusion Barrier	Arunagiri, T. N.; Zhang, Y.; Chyan, O.; El-Bounani, M.; Kim, M. J.; Wu, C. T.; Chen, L. C.; Chen, K. H.

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