臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立成功大學	2002-07-15	Residual stress and fracture in thick tetraethylorthosilicate (TEOS) and silane-based PECVD oxide films	Zhang, Xin; Chen, Kuo-Shen; Ghodssi, R.; Ayon, A. A.; Spearing, S. Mark
國立成功大學	2002-06	Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)	Chen, Kuo-Shen; Ayon, A. A.; Zhang, Xin; Spearing, S. Mark

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