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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
中原大學 2000-03-14 Method of fabricating contact holes in high density integrated circuits using polysilicon landing plug and self-aligned etching processes Erik S. Jeng;Yue-Feng Chen;Bi-Ling Chen
中原大學 2000-02-15 Two-step etching process for forming self-aligned contacts Bi-Ling Chen;Erik S. Jerry;Daniel Hao-Tien Lee
中原大學 1999-09-21 Method for simultaneously forming capacitor plate and metal contact structures for a high density DRAM device Fu-Liang Yang;Bi-Ling Chen;鄭湘原

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