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中國文化大學 |
2011-07 |
Comparative study of low dielectric constant material deposited using different precursors
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Wei, BJ (Wei, Bor-Jou); Cheng, YL (Cheng, Yi-Lung); Lu, FH (Lu, Fu-Hsing); Chiu, TJ (Chiu, Tai-Jung); Shih, HC (Shih, Han-Chang) |
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