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Institution	Date	Title	Author
國立交通大學	2014-12-12T01:57:09Z	以1,2,2,4-四甲基-1-氮-2-環戊烷作為先趨物利用電漿輔助化學氣相沉積法製備低介電碳氮化矽薄膜	邱維剛; Chiu, Wei-Gang; 呂志鵬; Leu, Jih-perng

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