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"chuang cccg"
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國立交通大學 |
2014-12-08T15:47:13Z |
HRTEM and EFTEM studies of the evolution of Cu/Ta/SiO2/Si interfaces in ULSI devices
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Yin, KM; Chang, L; Chen, FR; Kai, JJ; Chuang, CCCG; Shen, CF; Lo, SC; Ding, P; Chin, B; Zhang, H; Chen, F |
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