| 國立成功大學 |
2007-02 |
Effect of seed layer stress on the fabrication of monolithic MEMS microstructure
|
Chung, Chen-Kuei; Fang, Y. J.; Cheng, C. M.; Hong, Y. Z.; Wang, C. H. |
| 國立成功大學 |
2006-12-20 |
Thermal stability of Ta-Si-N nanocomposite thin films at different nitrogen flow ratios
|
Chung, Chen-Kuei; Chen, T. S.; Peng, C. C.; Wu, B. H. |
| 國立成功大學 |
2006-12-20 |
Annealing effects on microstructure and properties of Ta-Al thin film resistors
|
Chung, Chen-Kuei; Chang, Y. L.; Chen, T. S.; Su, P. J. |
| 國立成功大學 |
2006-12-05 |
Effect of amorphous Si layer on the reaction of carbon and silicon in the C/Si multilayer by high vacuum annealing
|
Chung, Chen-Kuei; Wu, Bo-Hsiung |
| 國立成功大學 |
2006-10-12 |
A novel fabrication of ionic polymer-metal composites (IPMC) actuator with silver nano-powders
|
Chung, Chen-Kuei; Fung, P. K.; Hong, Y. Z.; Ju, Ming-Shaung; Lin, Chou-Ching K.; Wu, T. C. |
| 國立成功大學 |
2006-07-14 |
Thermally induced formation of SiC nanoparticles from Si/C/Si multilayers deposited by ultra-high-vacuum ion beam sputtering
|
Chung, Chen-Kuei; Wu, Bo-Hsiung |
| 國立成功大學 |
2006-04-27 |
Global and local residual stress in silicon carbide films produced by plasma-enhanced chemical vapor deposition
|
Chung, Chen-Kuei; Lin, Tzu-Yin; Duh, Jenq-Gong; Tsai, Ming-Qun |
| 國立成功大學 |
2005-12 |
Simulation and fabrication for pin-to-plate microjoining by Nd : YAG laser
|
Chung, Chen-Kuei; Lin, Y. C. |
| 國立成功大學 |
2005-11-21 |
Amorphization of Ta-Al films using magnetron sputtering
|
Su, P. J.; Chung, Chen-Kuei |
| 國立成功大學 |
2005-11 |
Bulge formation and improvement of the polymer in CO2 laser micromachining
|
Chung, Chen-Kuei; Huang, G. R.; Lin, Y. C. |
| 國立成功大學 |
2005-01 |
Fabrication and characterization of amorphous Si films by PECVD for MEMS
|
Chung, Chen-Kuei; Tsai, Ming-Qun; Tsai, Po-Hao; Lee, Chiapyng |
| 國立成功大學 |
2004-11 |
Material characterization and nanohardness measurement of nanostructured Ta-Si-N film
|
Chung, Chen-Kuei; Su, P. J. |
| 國立成功大學 |
2004-10 |
Combination of thick resist and electroforming technologies for monolithic inkjet application
|
Chung, Chen-Kuei; Lin, C. J.; Chen, C. C.; Fang, Y. J.; Tsai, M. Q. |
| 國立成功大學 |
2004-10 |
Selection of mold materials for electroforming of monolithic two-layer microstructure
|
Chung, Chen-Kuei; Lin, C. J.; Wu, L. H.; Fang, Y. J.; Hong, Y. Z. |
| 國立成功大學 |
2004-04 |
Geometrical pattern effect on silicon deep etching by an inductively coupled plasma system
|
Chung, Chen-Kuei |
| 國立成功大學 |
2004-03 |
Modelling and fabrication of step height control of a multilevel Si(100) structure in KOH solution
|
Chung, Chen-Kuei |
