臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立交通大學	2019-04-02T05:58:09Z	Broadband UV-assisted thermal annealing of low-k silicon carbonitride films using a C-rich silazane precursor	Chang, Wei-Yuan; Chung, Hau-Ting; Chen, Yi-Chang; Leu, Jihperng
國立交通大學	2018-01-24T07:38:13Z	紫外光輔助退火對電漿輔助化學氣相沉積低介電碳氮化矽薄膜之影響	鐘皓廷; 呂志鵬; Chung, Hau-ting

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