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Institution	Date	Title	Author
臺大學術典藏	2018-09-10T03:27:21Z	Precise mask alignment design to crystal orientation of (100) silicon wafer using wet anisotropic etching	Chen, Ping-Hei; Hsieh, Chia-Ming; Peng, Hsin-Yah; Chyu, Minking K.; PING-HEI CHEN

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