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机构 日期 题名 作者
國立交通大學 2014-12-08T15:17:43Z Effect of surface passivation removal on planarization efficiency in Cu abrasive-free polishing Fang, JY; Tsai, MS; Dai, BT; Wu, YS; Feng, MS
國立交通大學 2014-12-08T15:17:35Z Study on pressure-independent Cu removal in Cu abrasive-free polishing Fang, JY; Huang, PW; Tsai, MS; Dai, BT; Wu, YS; Feng, MS
國立交通大學 2014-12-08T15:17:03Z Dopant profile engineering by near-infrared femtosecond laser activation Wang, YC; Pan, CL; Shieh, JM; Dai, BT
國立交通大學 2014-12-08T15:16:39Z Aging influence of poly(ethylene glycol) suppressors of Cu electrolytes on gaps filling Liu, SH; Li, TC; Chen, C; Shieh, JM; Dai, BT; Hensen, K; Cheng, SS
國立交通大學 2014-12-08T15:03:25Z IMPROVEMENT OF THIN OXIDES THERMALLY GROWN ON THE REACTIVE-ION-ETCHED SILICON SUBSTRATES UENG, SY; WANG, PW; KANG, TK; CHAO, TS; CHEN, WH; DAI, BT; CHENG, HC
國立交通大學 2014-12-08T15:03:25Z EFFECTS OF POLYSILICON ELECTRON-CYCLOTRON-RESONANCE ETCHING ON ELECTRICAL CHARACTERISTICS OF GATE OXIDES KANG, TK; UENG, SY; DAI, BT; CHEN, LP; CHENG, HC
國立交通大學 2014-12-08T15:03:11Z CHARACTERIZATION OF THE CHEMICAL-MECHANICAL POLISHING PROCESS-BASED ON NANOINDENTATION MEASUREMENT OF DIELECTRIC FILMS LIU, CW; DAI, BT; YEH, CF
國立交通大學 2014-12-08T15:03:02Z Chemical mechanical polishing of PSG and BPSG dielectric films: The effect of phosphorus and boron concentration Liu, CW; Dai, BT; Yeh, CF
國立交通大學 2014-12-08T15:02:53Z Antenna charging effects on the electrical characteristics of polysilicon gate during electron cyclotron resonance etching Kang, TK; Ueng, SY; Dai, BT; Chen, LP; Cheng, HC
國立交通大學 2014-12-08T15:02:52Z Modeling of the wear mechanism during chemical-mechanical polishing Liu, CW; Dai, BT; Tseng, WT; Yeh, CF
國立交通大學 2014-12-08T15:02:50Z Post cleaning of chemical mechanical polishing process Liu, CW; Dai, BT; Yeh, CF
國立交通大學 2014-12-08T15:02:49Z Fabrication of thin film transistors by chemical mechanical polished polycrystalline silicon films Chang, CY; Lin, HY; Lei, TF; Cheng, JY; Chen, LP; Dai, BT
國立交通大學 2014-12-08T15:02:33Z A novel technology to reduce the antenna charging effects during polysilicon gate electron-cyclotron-resonance etching Cheng, HC; Kang, TK; Ku, TK; Dai, BT; Chen, LP
國立交通大學 2014-12-08T15:02:11Z Effects of mechanical characteristics on the chemical-mechanical polishing of dielectric thin films Tseng, WT; Liu, CW; Dai, BT; Yeh, CF
國立交通大學 2014-12-08T15:01:16Z Charging damages to gate oxides in a helicon O-2 plasma Lin, W; Kang, TK; Perng, YC; Dai, BT; Cheng, HC
國立屏東大學 2008 Influence of mask magnification effects on the diffracted light and lithographic imaging for EUV phase shifting mask 張雯惠;CH*, Lin;Shieh, J;Chang, WH;Dai, BT.

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