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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Showing items 21-30 of 56  (6 Page(s) Totally)
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Institution Date Title Author
國立交通大學 2014-12-08T15:41:48Z Investigation of carrying agents on microstructure of electroplated Cu films Shieh, JM; Chang, SC; Dai, BT; Feng, MS
國立交通大學 2014-12-08T15:41:47Z Investigations of pulse current electrodeposition for damascene copper metals Chang, SC; Shieh, JM; Dai, BT; Feng, MS
國立交通大學 2014-12-08T15:41:39Z Pattern effects on planarization efficiency of Cu electropolishing Chang, SC; Shieh, JM; Huang, CC; Dai, BT; Feng, MS
國立交通大學 2014-12-08T15:41:17Z Improving the quality of electroplated copper films by rapid thermal annealing Chang, SC; Shieh, JM; Dai, BT; Feng, MS; Wang, YL
國立交通大學 2014-12-08T15:40:54Z Superpolishing for planarizing copper damascene interconnects Chang, SC; Shieh, JM; Dai, BT; Feng, MS; Li, YH; Shih, CH; Tsai, MH; Shue, SL; Liang, RS; Wang, YL
國立交通大學 2014-12-08T15:40:06Z The application of electrochemical metrologies for investigating chemical mechanical polishing of Al with a Ti barrier layer Chiu, SY; Wang, YL; Liu, CP; Lan, JK; Ay, C; Feng, MS; Tsai, MS; Dai, BT
國立交通大學 2014-12-08T15:39:57Z Roles of copper mechanical characteristics in electropolishing Chang, SC; Shieh, JM; Fang, JY; Wang, YL; Dai, BT; Feng, MS
國立交通大學 2014-12-08T15:39:46Z Stable blue luminescence from mesoporous silica films Shieh, JM; Cho, AT; Lai, YF; Dai, BT; Pan, FM; Chao, KJ
國立交通大學 2014-12-08T15:39:45Z Synthesis of microcrystalline silicon at room temperature using ICP Wu, JH; Shieh, JM; Dai, BT; Wu, YCS
國立交通大學 2014-12-08T15:39:17Z The removal of airborne molecular contamination in cleanroom using PTFE and chemical filters Yeh, CF; Hsiao, CW; Lin, SJ; Hsieh, CM; Kusumi, T; Aomi, H; Kaneko, H; Dai, BT; Tsai, MS

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