臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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Institution	Date	Title	Author
中原大學	1998	Selective Plasma Etching for High-Aspect-Ratio Oxide Contact Holes	Yun-Sang Kim;Peter Ta-Chin Wei;George R. Tynan;Robert Charatan;Dave Hemker

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