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| 國立交通大學 |
2020-10-05T02:01:06Z |
Heteroepitaxial growth and microwave plasma annealing of DC reactive sputtering deposited TiZrN film on Si (100)
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Chiu, Kun-An; Fu, Chia-Wei; Fang, Yu-Siang; Thi Hien Do; Shih, Fu-Han; Chang, Li |
| 國立交通大學 |
2020-10-05T02:01:03Z |
Reactive Sputtering Deposition of Epitaxial TiC Film on Si (100) Substrate
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Fang, Yu-Siang; Thi Hien Do; Chiu, Kun-An; Chen, Wei-Chun; Chang, Li |
| 國立交通大學 |
2019-12-13T01:10:01Z |
Reactive sputtering for highly oriented HfN film growth on Si (100) substrate
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Fang, Yu-Siang; Chiu, Kun-An; Do, Hien; Chang, Li |
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