臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	Repositories
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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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	臺大學術典藏NTU Scholars

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Institution	Date	Title	Author
元智大學	Oct-20	Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor Manufacturing	Shu-Kai S. Fan; Chia-Yu Hsu; Du-Ming Tsai; Fei He; Chun-Chung Cheng
元智大學	May-22	Data Visualization of Anomaly Detection in Semiconductor Processing Tools	Shu-Kai S. Fan; Du-Ming Tsai; Chih-Hung Jen; Chia-Yu Hsu; Fei He; Li-Ting Juan
元智大學	Jul-19	Key parameter identification and defective wafer detection of semiconductor manufacturing processes using image processing techniques	Shu-Kai S. Fan; Du-Ming Tsai; Fei He; Jui-Yu Huang; Chih-Hung Jen

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