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國立臺灣大學 |
2001-01 |
Structure and Elastic Properties of Amorphous SiCN Films
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Lehmann, G.; Hess, P.; Wu, J.-J.; Wu, C. T.; Wong, T. S.; Chen, K. H.; Chen, L. C.; Lee, H.-Y.; Amkreutz, M.; Frauenheim, Th. |
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