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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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2019臺灣學術機構典藏
研討會
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Institution Date Title Author
臺大學術典藏 2022-01-03T08:01:17Z Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write Fu-Min Wang; Kuen-Yu Tsai;  Jia-Han Li; Alek C. Chen; Yen-Min Lee; Yu-Tian Shen; Hsin-Hung Cheng; Chieh-Hsiang Kuan; JIA-HAN LI
臺大學術典藏 2022-01-03T08:01:15Z Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images Yen-Min Lee;  Jia-Han Li*; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen;   Kuen-Yu Tsai; Alek C. Chen; JIA-HAN LI
臺大學術典藏 2018-09-10T15:00:24Z Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises Yen-Min Lee;Jia-Han Li;Fu-Min Wang;Hsin-Hung Cheng;Yu-Tian Shen;Kuen-Yu Tsai;Jason Shieh;Alek Chen; Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Jason Shieh; Alek Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:18Z A Social Diffusion Model with an Application on Election Simulation Jing-Kai Lou;Fu-Min Wang;Chin-Hua Tsai;San-Chuan Hung;Perng-Hwa Kung;Shou-De Lin;Kuan-Ta Chen;Chin-Laung Lei; Jing-Kai Lou; Fu-Min Wang; Chin-Hua Tsai; San-Chuan Hung; Perng-Hwa Kung; Shou-De Lin; Kuan-Ta Chen; Chin-Laung Lei; CHIN-LAUNG LEI; SHOU-DE LIN
臺大學術典藏 2018-09-10T08:46:33Z Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:32Z Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects Philip C. W. Ng; Kuen-Yu Tsai; Yen-Min Lee; Fu-Min Wang; Jia-Han Li; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:32Z Fabrication method of high-quality Ge nanocrystals on patterned Si substrates by local melting point control Chien-Wei Chiu; Ting-Wei Liao; Kuen-Yu Tsai; Fu-Min Wang; Yuen-Wuu Suen; Chieh-Hsiung Kuan; KUEN-YU TSAI; CHIEH-HSIUNG KUAN
臺大學術典藏 2018-09-10T08:18:26Z Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write Fu-Min Wang;Kuen-Yu Tsai;Jia-Han Li;Alek C. Chen;Yen-Min Lee;Yu-Tian Shen;Hsin-Hung Cheng;Chieh-Hsiang Kuan; Fu-Min Wang; Kuen-Yu Tsai; Jia-Han Li; Alek C. Chen; Yen-Min Lee; Yu-Tian Shen; Hsin-Hung Cheng; Chieh-Hsiang Kuan; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:22Z 10 nm lines with 14 nm half pitch grating written in HSQ by electron beam direct write at 5 keV Fu-Min Wang;Susumu Ono;Hsin-Hung Su;Kuen-Yu Tsai;Chieh-Hsiung Kuan; Fu-Min Wang; Susumu Ono; Hsin-Hung Su; Kuen-Yu Tsai; Chieh-Hsiung Kuan; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:20Z Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method Yen-Min Lee;Jia-Han Li;Philip C. W. Ng;Ting-Hang Pei;Fu-Min Wang;Kuen-Yu Tsai;Alek C. Chen; Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Hang Pei; Fu-Min Wang; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T07:42:07Z Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method Yen-Min Lee;Jia-Han Li;Philip C. W. Ng;Ting-Han Pei;Fu-Min Wang;Kuen-Yu Tsai;Alek C. Chen; Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Han Pei; Fu-Min Wang; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T07:42:07Z High resolution electron beam direct write on ZEP520 at 5 KeV Fu-Min Wang;S. Ono;Hsing-Hong Su;Kuen-Yu Tsai;Chieh-Hsiung Kuan; Fu-Min Wang; S. Ono; Hsing-Hong Su; Kuen-Yu Tsai; Chieh-Hsiung Kuan; KUEN-YU TSAI
臺大學術典藏 2018-09-10T07:42:06Z A fully model-based methodology for simultaneously correcting EUV mask shadowing and optical proximity effects with improved pattern transfer fidelity and process windows Philip C. W. Ng;Kuen-Yu Tsai;Yen-Min Lee;Ting-Han Pei;Fu-Min Wang;Jia-Han Li;Alek C. Chen; Philip C. W. Ng; Kuen-Yu Tsai; Yen-Min Lee; Ting-Han Pei; Fu-Min Wang; Jia-Han Li; Alek C. Chen; KUEN-YU TSAI
國立高雄師範大學 2015-07-15 氮化鋁鎵/氮化鎵摻雜通道場效電晶體之研究 王富民; Fu-Min Wang
元智大學 2012 應用於簡報作業之人機智慧型互動技術之研究 王富民; Fu-Min Wang

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