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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
臺大學術典藏 2018-09-10T08:18:09Z Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithography S. Y. Chen;K. Y. Tsai;H. T. Ng;C. H. Fan;T. H. Pei;C. H. Kuan;Y. Y. Chen;Y. H. Kuo;C. J. Wu;J. Y. Yen; S. Y. Chen; K. Y. Tsai; H. T. Ng; C. H. Fan; T. H. Pei; C. H. Kuan; Y. Y. Chen; Y. H. Kuo; C. J. Wu; J. Y. Yen; YUNG-YAW CHEN
臺大學術典藏 2018-09-10T08:18:09Z Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithography S. Y. Chen;K. Y. Tsai;H. T. Ng;C. H. Fan;T. H. Pei;C. H. Kuan;Y. Y. Chen;Y. H. Kuo;C. J. Wu;J. Y. Yen; S. Y. Chen; K. Y. Tsai; H. T. Ng; C. H. Fan; T. H. Pei; C. H. Kuan; Y. Y. Chen; Y. H. Kuo; C. J. Wu; J. Y. Yen; YUNG-YAW CHEN

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