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Institution Date Title Author
中原大學 2001-07-24 Method for forming self-aligned contacts using a hard mask Tzu-Shih Yen;Erik S. Jeng;Hao-Chieh Liu;Hung-Yi Luo
中原大學 2000-08-15 Method of forming a contact hole in a semiconductor device Erik S. Jeng;Bi-Ling Chen;Hao-Chieh Liu
中原大學 2000-06-27 Method for forming multi-level contacts using a H-containing fluorocarbon chemistry Bi-Ling Chen;Erik S. Jeng;Hao-Chieh Liu
中原大學 2000-06-13 Method for forming multi-level contacts Hao-Chieh Liu;Erik S. Jeng;Bi-Ling Chen;Wan-Yih Lien
中原大學 1999-10-26 Method for fabricating reduced contacts using retardation layers Hao-Chieh Liu;鄭湘原
中原大學 1999-05-25 Method for etching high aspect-ratio multilevel contacts Hao-Chieh Liu;鄭湘原

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