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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
中原大學 1993-04 以電漿輔助化學氣相沈積法研製平面式 SiON/SiO/sub 2//Si結構之波導元件 Planar SiON/SiO/sub 2//Si Waveguides Prepared by Plasma-Enhanced Chemical Vapor Deposition 鄭香平;周榮泉;涂元光 ;heng, Hsiang-Pyng;Chou, Jung-Chuan;Tu, Yuan-Kuang

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