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| 國立交通大學 |
2017-04-21T06:49:14Z |
A Novel Junctionless FinFET Structure with Sub-5nm Shell Doping Profile by Molecular Monolayer Doping and Microwave Annealing
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Lee, Y. -J.; Cho, T. -C.; Kao, K. -H.; Sung, P. -J.; Hsueh, F. -K.; Huang, P. -C.; Wu, C. -T.; Hsu, S. -H.; Huang, W. -H.; Chen, H. -C.; Li, Y.; Current, M. I.; Hengstebeck, B.; Marino, J.; Bueyueklimanli, T.; Shieh, J. -M.; Chao, T. -S.; Wu, W. -F.; Yeh, W. -K. |
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