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Showing items 1-3 of 3 (1 Page(s) Totally) 1 View [10|25|50] records per page
國立交通大學 |
2014-12-08T15:36:00Z |
Two-additive electrolytes for superplanarizing damascene Cu metals
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Liu, SH; Shieh, JM; Chen, C; Dai, BT; Hensen, K; Cheng, SS |
國立交通大學 |
2014-12-08T15:17:42Z |
Roles of additives in damascene copper electropolishing
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Liu, SH; Shieh, JM; Chen, C; Hensen, K; Cheng, SS |
國立交通大學 |
2014-12-08T15:16:39Z |
Aging influence of poly(ethylene glycol) suppressors of Cu electrolytes on gaps filling
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Liu, SH; Li, TC; Chen, C; Shieh, JM; Dai, BT; Hensen, K; Cheng, SS |
Showing items 1-3 of 3 (1 Page(s) Totally) 1 View [10|25|50] records per page
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