臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立交通大學	2014-12-08T15:36:00Z	Two-additive electrolytes for superplanarizing damascene Cu metals	Liu, SH; Shieh, JM; Chen, C; Dai, BT; Hensen, K; Cheng, SS
國立交通大學	2014-12-08T15:17:42Z	Roles of additives in damascene copper electropolishing	Liu, SH; Shieh, JM; Chen, C; Hensen, K; Cheng, SS
國立交通大學	2014-12-08T15:16:39Z	Aging influence of poly(ethylene glycol) suppressors of Cu electrolytes on gaps filling	Liu, SH; Li, TC; Chen, C; Shieh, JM; Dai, BT; Hensen, K; Cheng, SS

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