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國立成功大學 |
2012-11 |
The Effects of Crystallization on Mechanical Mechanism and Residual Stress of Sputtered Ag Thin Films
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Hung, FY (Hung, F. Y.); Lui, TS (Lui, T. S.); Hu, ZS (Hu, Z. S.); Chang, SJ (Chang, S. J.); Chen, LH (Chen, L. H.); Chen, KJ (Chen, K. J.) |
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