臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立臺灣科技大學	2013	Growth, thermal stability and Cu diffusivity of reactively sputtered NbN thin films as diffusion barriers between Cu and Si	Huang, C.-L.;Lai, C.-H.;Tsai, P.-H.;Huang, H.-A.;Lin, J.-C.;Lee, C.
國立臺灣科技大學	2013	Characteristics of reactively sputtered niobium nitride thin films as diffusion barriers for Cu metallization	Huang, C.-L.;Lai, C.-H.;Tsai, P.-H.;Huang, H.-A.;Lin, J.-C.;Lee, C.

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