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| 國立臺灣科技大學 |
2013 |
Growth, thermal stability and Cu diffusivity of reactively sputtered NbN thin films as diffusion barriers between Cu and Si
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Huang, C.-L.;Lai, C.-H.;Tsai, P.-H.;Huang, H.-A.;Lin, J.-C.;Lee, C. |
| 國立臺灣科技大學 |
2013 |
Characteristics of reactively sputtered niobium nitride thin films as diffusion barriers for Cu metallization
|
Huang, C.-L.;Lai, C.-H.;Tsai, P.-H.;Huang, H.-A.;Lin, J.-C.;Lee, C. |
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