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Showing items 26-33 of 33 (2 Page(s) Totally)
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| 臺大學術典藏 |
2020-03-02T06:40:07Z |
Impact of integrating equipment health in production scheduling for semiconductor fabrication
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Kao, Y.-T.; Dauz?re-P?r?s, S.; Blue, J.; Chang, S.-C.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:06Z |
The detection and the control of machine/chamber mismatching in semiconductormanufacturing
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Chouichi, A.; Blue, J.; Yugma, C.; Pasqualini, F.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:06Z |
Virtual metrology modeling based on Gaussian Bayesian network
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Yang, W.-T.; Blue, J.; Roussy, A.; Reis, M.S.; Pinaton, J.; JAKEY BLUE |
| 臺大學術典藏 |
2020-03-02T06:40:06Z |
Equipment Deterioration Modeling and Causes Diagnosis in Semiconductor Manufacturing
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Rostami, H.; Blue, J.; Chen, A.; Yugma, C.; JAKEY BLUE |
| 臺大學術典藏 |
2019 |
A Structure Data-Driven Framework for Virtual Metrology Modeling
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Wei-Ting Yang; JAKEY BLUE; Agnes Roussy; Jacques Pinaton; Marco S. Reis |
| 臺大學術典藏 |
2017 |
Equipment condition diagnosis and fault fingerprint extraction in semiconductor manufacturing
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Rostami, H.; Blue, J.; Yugma, C.; JAKEY BLUE |
| 臺大學術典藏 |
2013 |
Tool condition diagnosis with a recipe-independent hierarchical monitoring scheme
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Blue, J.; Gleispach, D.; Roussy, A.; Scheibelhofer, P.; JAKEY BLUE |
| 國立臺灣大學 |
2009-11 |
Recipe-independent Indicator for Tool Health Diagnosis and Predictive Maintenance
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Chen, Argon; Jakey Blue |
Showing items 26-33 of 33 (2 Page(s) Totally)
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