| 臺大學術典藏 |
2018-09-10T15:26:03Z |
Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution
|
Yen-Min Lee;Szu-Hung Chen;Chen-Pin Hsu;Pei-Chuen Chiou;Kuen-Yu Tsai;Tien-Tung Chung;Cheng-Han Tsai;Zhan-Yu Liu;Jia-Han Li; Yen-Min Lee; Szu-Hung Chen; Chen-Pin Hsu; Pei-Chuen Chiou; Kuen-Yu Tsai; Tien-Tung Chung; Cheng-Han Tsai; Zhan-Yu Liu; Jia-Han Li; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T15:26:03Z |
Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution
|
Yen-Min Lee;Szu-Hung Chen;Chen-Pin Hsu;Pei-Chuen Chiou;Kuen-Yu Tsai;Tien-Tung Chung;Cheng-Han Tsai;Zhan-Yu Liu;Jia-Han Li; Yen-Min Lee; Szu-Hung Chen; Chen-Pin Hsu; Pei-Chuen Chiou; Kuen-Yu Tsai; Tien-Tung Chung; Cheng-Han Tsai; Zhan-Yu Liu; Jia-Han Li; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T15:26:03Z |
Multilayer Mirror Structure (多層反射鏡結構)
|
Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T15:26:03Z |
Multilayer Mirror Structure (多層反射鏡結構)
|
Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T15:00:24Z |
Refractive index and effective thickness measurement system for the RGB color filter coatings with absorption and scattering properties
|
Yen-Min Lee;Hsin-Hung Cheng;Jia-Han Li;Kuen-Yu Tsai;Yu-Tian Sheng; Yen-Min Lee; Hsin-Hung Cheng; Jia-Han Li; Kuen-Yu Tsai; Yu-Tian Sheng; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T15:00:24Z |
Refractive index and effective thickness measurement system for the RGB color filter coatings with absorption and scattering properties
|
Yen-Min Lee;Hsin-Hung Cheng;Jia-Han Li;Kuen-Yu Tsai;Yu-Tian Sheng; Yen-Min Lee; Hsin-Hung Cheng; Jia-Han Li; Kuen-Yu Tsai; Yu-Tian Sheng; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T15:00:24Z |
Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises
|
Yen-Min Lee;Jia-Han Li;Fu-Min Wang;Hsin-Hung Cheng;Yu-Tian Shen;Kuen-Yu Tsai;Jason Shieh;Alek Chen; Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Jason Shieh; Alek Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T15:00:24Z |
Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises
|
Yen-Min Lee;Jia-Han Li;Fu-Min Wang;Hsin-Hung Cheng;Yu-Tian Shen;Kuen-Yu Tsai;Jason Shieh;Alek Chen; Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Jason Shieh; Alek Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T15:00:24Z |
Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts
|
Yi-Yeh Yang;Hsuan-Ping Lee;Chun-Hung Liu;Hao-Yun Yu;Kuen-Yu Tsai;Jia-Han Li; Yi-Yeh Yang; Hsuan-Ping Lee; Chun-Hung Liu; Hao-Yun Yu; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T15:00:24Z |
Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts
|
Yi-Yeh Yang;Hsuan-Ping Lee;Chun-Hung Liu;Hao-Yun Yu;Kuen-Yu Tsai;Jia-Han Li; Yi-Yeh Yang; Hsuan-Ping Lee; Chun-Hung Liu; Hao-Yun Yu; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T15:00:24Z |
A New EUV Mask Blank Defect Inspection Method with Coherent Diffraction Imaging
|
Ding Qi;Kuen-Yu Tsai;Jia-Han Li; Ding Qi; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T15:00:24Z |
A New EUV Mask Blank Defect Inspection Method with Coherent Diffraction Imaging
|
Ding Qi;Kuen-Yu Tsai;Jia-Han Li; Ding Qi; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T09:50:34Z |
Void-based photonic crystal mirror with high-reflectivity and low-dissipation for extreme-ultraviolet radiation
|
Yen-Min Lee;Jia-Han Li;Kuen-Yu Tsai; Yen-Min Lee; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T09:50:34Z |
Void-based photonic crystal mirror with high-reflectivity and low-dissipation for extreme-ultraviolet radiation
|
Yen-Min Lee;Jia-Han Li;Kuen-Yu Tsai; Yen-Min Lee; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T09:50:34Z |
Direct-scatterometry-enabled optical-proximity-correction-model calibration
|
Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T09:50:34Z |
Direct-scatterometry-enabled optical-proximity-correction-model calibration
|
Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T09:25:00Z |
Direct-scatterometry-enabled lithography model calibration
|
Chih-Yu Chen;Kuen-Yu Tsai;Yu-Tian Shen;Yen-Min Lee;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Kuen-Yu Tsai; Yu-Tian Shen; Yen-Min Lee; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T09:25:00Z |
Direct-scatterometry-enabled lithography model calibration
|
Chih-Yu Chen;Kuen-Yu Tsai;Yu-Tian Shen;Yen-Min Lee;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Kuen-Yu Tsai; Yu-Tian Shen; Yen-Min Lee; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T09:25:00Z |
Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example
|
Yen-Min Lee;Jia-Han Li;Tony Wen-Hann Sheu;Kuen-Yu Tsai;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T09:25:00Z |
Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example
|
Yen-Min Lee;Jia-Han Li;Tony Wen-Hann Sheu;Kuen-Yu Tsai;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:46:35Z |
Multilayer Mirror Structure
|
Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:46:35Z |
Multilayer Mirror Structure
|
Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:46:34Z |
Method for Calibrating A Manufacturing Process Model (National Taiwan University/ASML Holding N.V.)
|
Kuen-Yu Tsai;Alek C. Chen;Jia-Han Li; Kuen-Yu Tsai; Alek C. Chen; Jia-Han Li; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:46:34Z |
Method for Calibrating A Manufacturing Process Model (National Taiwan University/ASML Holding N.V.)
|
Kuen-Yu Tsai;Alek C. Chen;Jia-Han Li; Kuen-Yu Tsai; Alek C. Chen; Jia-Han Li; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:46:33Z |
Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images
|
Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:46:32Z |
Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects
|
Philip C. W. Ng; Kuen-Yu Tsai; Yen-Min Lee; Fu-Min Wang; Jia-Han Li; Alek C. Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:18:26Z |
Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write
|
Fu-Min Wang;Kuen-Yu Tsai;Jia-Han Li;Alek C. Chen;Yen-Min Lee;Yu-Tian Shen;Hsin-Hung Cheng;Chieh-Hsiang Kuan; Fu-Min Wang; Kuen-Yu Tsai; Jia-Han Li; Alek C. Chen; Yen-Min Lee; Yu-Tian Shen; Hsin-Hung Cheng; Chieh-Hsiang Kuan; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:18:26Z |
Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write
|
Fu-Min Wang;Kuen-Yu Tsai;Jia-Han Li;Alek C. Chen;Yen-Min Lee;Yu-Tian Shen;Hsin-Hung Cheng;Chieh-Hsiang Kuan; Fu-Min Wang; Kuen-Yu Tsai; Jia-Han Li; Alek C. Chen; Yen-Min Lee; Yu-Tian Shen; Hsin-Hung Cheng; Chieh-Hsiang Kuan; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:18:26Z |
Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography system
|
Yen-Min Lee;Jia-Han Li;Sheng-Yung Chen;Shiau-Yi Ma;Kuen-Yu Tsai;Tony W. H. Sheu;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; Tony W. H. Sheu; Jia-Yush Yen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:18:26Z |
Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography system
|
Yen-Min Lee;Jia-Han Li;Sheng-Yung Chen;Shiau-Yi Ma;Kuen-Yu Tsai;Tony W. H. Sheu;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; Tony W. H. Sheu; Jia-Yush Yen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:18:25Z |
High spatial resolution and large field intensity by a set of two modified zone plates
|
Zhan-Yu Liu;Yao-Jen Tsai;Jia-Han Li;Kuen-Yu Tsai; Zhan-Yu Liu; Yao-Jen Tsai; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:18:25Z |
High spatial resolution and large field intensity by a set of two modified zone plates
|
Zhan-Yu Liu;Yao-Jen Tsai;Jia-Han Li;Kuen-Yu Tsai; Zhan-Yu Liu; Yao-Jen Tsai; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:18:21Z |
Stochastic simulation of photon scattering for EUV mask defect inspection
|
Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:18:21Z |
Stochastic simulation of photon scattering for EUV mask defect inspection
|
Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:18:20Z |
Fresnel zone plate manufacturability analysis for direct-write lithography by simulating focusing and patterning performance versus fabrication errors
|
Kuen-Yu Tsai; Sheng-Yung Chen; Ting-Han Pei; Jia-Han Li; KUEN-YU TSAI; Kuen-Yu Tsai;Sheng-Yung Chen;Ting-Han Pei;Jia-Han Li |
| 臺大學術典藏 |
2018-09-10T08:18:20Z |
Fresnel zone plate manufacturability analysis for direct-write lithography by simulating focusing and patterning performance versus fabrication errors
|
Kuen-Yu Tsai; Sheng-Yung Chen; Ting-Han Pei; Jia-Han Li; KUEN-YU TSAI; Kuen-Yu Tsai;Sheng-Yung Chen;Ting-Han Pei;Jia-Han Li |
| 臺大學術典藏 |
2018-09-10T08:18:20Z |
Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method
|
Yen-Min Lee;Jia-Han Li;Philip C. W. Ng;Ting-Hang Pei;Fu-Min Wang;Kuen-Yu Tsai;Alek C. Chen; Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Hang Pei; Fu-Min Wang; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T08:18:20Z |
Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method
|
Yen-Min Lee;Jia-Han Li;Philip C. W. Ng;Ting-Hang Pei;Fu-Min Wang;Kuen-Yu Tsai;Alek C. Chen; Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Hang Pei; Fu-Min Wang; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T07:42:07Z |
Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method
|
Yen-Min Lee;Jia-Han Li;Philip C. W. Ng;Ting-Han Pei;Fu-Min Wang;Kuen-Yu Tsai;Alek C. Chen; Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Han Pei; Fu-Min Wang; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T07:42:07Z |
Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method
|
Yen-Min Lee;Jia-Han Li;Philip C. W. Ng;Ting-Han Pei;Fu-Min Wang;Kuen-Yu Tsai;Alek C. Chen; Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Han Pei; Fu-Min Wang; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T07:42:06Z |
Effects of Fresnel zone plate fabrication errors on focusing performances
|
Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T07:42:06Z |
Effects of Fresnel zone plate fabrication errors on focusing performances
|
Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T07:42:06Z |
A fully model-based methodology for simultaneously correcting EUV mask shadowing and optical proximity effects with improved pattern transfer fidelity and process windows
|
Philip C. W. Ng;Kuen-Yu Tsai;Yen-Min Lee;Ting-Han Pei;Fu-Min Wang;Jia-Han Li;Alek C. Chen; Philip C. W. Ng; Kuen-Yu Tsai; Yen-Min Lee; Ting-Han Pei; Fu-Min Wang; Jia-Han Li; Alek C. Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018-09-10T07:42:06Z |
A fully model-based methodology for simultaneously correcting EUV mask shadowing and optical proximity effects with improved pattern transfer fidelity and process windows
|
Philip C. W. Ng;Kuen-Yu Tsai;Yen-Min Lee;Ting-Han Pei;Fu-Min Wang;Jia-Han Li;Alek C. Chen; Philip C. W. Ng; Kuen-Yu Tsai; Yen-Min Lee; Ting-Han Pei; Fu-Min Wang; Jia-Han Li; Alek C. Chen; KUEN-YU TSAI |
| 臺大學術典藏 |
2018 |
Effects of band shifting on permittivity of plasmonic material
|
Chiu, M.-H.; Li, J.-H.; JIA-HAN LI |
| 臺大學術典藏 |
2017 |
Vortex energy flows generated by core-shell nanospheres
|
Chen, S.-W.; Li, J.-H.; JIA-HAN LI |
| 臺大學術典藏 |
2017 |
Fabrication of metrology test structures with helium ion beam direct write
|
Lee, C.-L.; Chien, S.-W.; Chen, S.-Y.; Liu, C.-H.; Tsai, K.-Y.; Li, J.-H.; Shew, B.-Y.; Hong, C.-S.; Lee, C.-T.; JIA-HAN LI |
| 臺大學術典藏 |
2016 |
Development of an explicit non-staggered scheme for solving three-dimensional Maxwell's equations
|
Sheu, T.W.H.; Chung, Y.W.; Li, J.H.; Wang, Y.C.; JIA-HAN LI |
| 臺大學術典藏 |
2016 |
3D Nanostructures of Silver Nanoparticle-Decorated Suspended Graphene for SERS Detection
|
Li, J.-H.; Hsueh, C.-H.; JIA-HAN LI; Chen, M.-J.; Chao, B.-K.; Chien, M.-H.; Nien, L.-W. |
| 臺大學術典藏 |
2015 |
Effects of corner radius on periodic nanoantenna for surface-enhanced Raman spectroscopy
|
Chao, B.-K.; Lin, S.-C.; Nien, L.-W.; Li, J.-H.; Hsueh, C.-H.; JIA-HAN LI |
