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Showing items 216-265 of 280  (6 Page(s) Totally)
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Institution Date Title Author
臺大學術典藏 2019-10-31T07:57:58Z Fabrication of metrology test structures with programmed imperfection using helium ion beam direct write KUEN-YU TSAI;Jia-Han Li;Kuen-Yu Tsai*;Sheng-Wei Chien; Sheng-Wei Chien; Kuen-Yu Tsai*; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2019-10-31T07:57:58Z Fabrication of metrology test structures with programmed imperfection using helium ion beam direct write KUEN-YU TSAI;Jia-Han Li;Kuen-Yu Tsai*;Sheng-Wei Chien; Sheng-Wei Chien; Kuen-Yu Tsai*; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2019 Surface plasmons excited by multiple layer grating Wu, C.-L.; Hsueh, C.-H.; Li, J.-H.; JIA-HAN LI
臺大學術典藏 2018-09-10T15:26:03Z Comparison of the vectorial diffraction theory and Fraunhofer approximation method on diffractive images of Fresnel zone plates Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:26:03Z Comparison of the vectorial diffraction theory and Fraunhofer approximation method on diffractive images of Fresnel zone plates Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:26:03Z Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution Yen-Min Lee;Szu-Hung Chen;Chen-Pin Hsu;Pei-Chuen Chiou;Kuen-Yu Tsai;Tien-Tung Chung;Cheng-Han Tsai;Zhan-Yu Liu;Jia-Han Li; Yen-Min Lee; Szu-Hung Chen; Chen-Pin Hsu; Pei-Chuen Chiou; Kuen-Yu Tsai; Tien-Tung Chung; Cheng-Han Tsai; Zhan-Yu Liu; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:26:03Z Supplementary zones-surrounded Fresnel zone plate with enhanced optical resolution Yen-Min Lee;Szu-Hung Chen;Chen-Pin Hsu;Pei-Chuen Chiou;Kuen-Yu Tsai;Tien-Tung Chung;Cheng-Han Tsai;Zhan-Yu Liu;Jia-Han Li; Yen-Min Lee; Szu-Hung Chen; Chen-Pin Hsu; Pei-Chuen Chiou; Kuen-Yu Tsai; Tien-Tung Chung; Cheng-Han Tsai; Zhan-Yu Liu; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:26:03Z Multilayer Mirror Structure (多層反射鏡結構) Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:26:03Z Multilayer Mirror Structure (多層反射鏡結構) Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Refractive index and effective thickness measurement system for the RGB color filter coatings with absorption and scattering properties Yen-Min Lee;Hsin-Hung Cheng;Jia-Han Li;Kuen-Yu Tsai;Yu-Tian Sheng; Yen-Min Lee; Hsin-Hung Cheng; Jia-Han Li; Kuen-Yu Tsai; Yu-Tian Sheng; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Refractive index and effective thickness measurement system for the RGB color filter coatings with absorption and scattering properties Yen-Min Lee;Hsin-Hung Cheng;Jia-Han Li;Kuen-Yu Tsai;Yu-Tian Sheng; Yen-Min Lee; Hsin-Hung Cheng; Jia-Han Li; Kuen-Yu Tsai; Yu-Tian Sheng; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises Yen-Min Lee;Jia-Han Li;Fu-Min Wang;Hsin-Hung Cheng;Yu-Tian Shen;Kuen-Yu Tsai;Jason Shieh;Alek Chen; Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Jason Shieh; Alek Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises Yen-Min Lee;Jia-Han Li;Fu-Min Wang;Hsin-Hung Cheng;Yu-Tian Shen;Kuen-Yu Tsai;Jason Shieh;Alek Chen; Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Jason Shieh; Alek Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts Yi-Yeh Yang;Hsuan-Ping Lee;Chun-Hung Liu;Hao-Yun Yu;Kuen-Yu Tsai;Jia-Han Li; Yi-Yeh Yang; Hsuan-Ping Lee; Chun-Hung Liu; Hao-Yun Yu; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts Yi-Yeh Yang;Hsuan-Ping Lee;Chun-Hung Liu;Hao-Yun Yu;Kuen-Yu Tsai;Jia-Han Li; Yi-Yeh Yang; Hsuan-Ping Lee; Chun-Hung Liu; Hao-Yun Yu; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z A New EUV Mask Blank Defect Inspection Method with Coherent Diffraction Imaging Ding Qi;Kuen-Yu Tsai;Jia-Han Li; Ding Qi; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z A New EUV Mask Blank Defect Inspection Method with Coherent Diffraction Imaging Ding Qi;Kuen-Yu Tsai;Jia-Han Li; Ding Qi; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:34Z Void-based photonic crystal mirror with high-reflectivity and low-dissipation for extreme-ultraviolet radiation Yen-Min Lee;Jia-Han Li;Kuen-Yu Tsai; Yen-Min Lee; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:34Z Void-based photonic crystal mirror with high-reflectivity and low-dissipation for extreme-ultraviolet radiation Yen-Min Lee;Jia-Han Li;Kuen-Yu Tsai; Yen-Min Lee; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:34Z Direct-scatterometry-enabled optical-proximity-correction-model calibration Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:34Z Direct-scatterometry-enabled optical-proximity-correction-model calibration Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Direct-scatterometry-enabled lithography model calibration Chih-Yu Chen;Kuen-Yu Tsai;Yu-Tian Shen;Yen-Min Lee;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Kuen-Yu Tsai; Yu-Tian Shen; Yen-Min Lee; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Direct-scatterometry-enabled lithography model calibration Chih-Yu Chen;Kuen-Yu Tsai;Yu-Tian Shen;Yen-Min Lee;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Kuen-Yu Tsai; Yu-Tian Shen; Yen-Min Lee; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example Yen-Min Lee;Jia-Han Li;Tony Wen-Hann Sheu;Kuen-Yu Tsai;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example Yen-Min Lee;Jia-Han Li;Tony Wen-Hann Sheu;Kuen-Yu Tsai;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:35Z Multilayer Mirror Structure Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:35Z Multilayer Mirror Structure Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:34Z Method for Calibrating A Manufacturing Process Model (National Taiwan University/ASML Holding N.V.) Kuen-Yu Tsai;Alek C. Chen;Jia-Han Li; Kuen-Yu Tsai; Alek C. Chen; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:34Z Method for Calibrating A Manufacturing Process Model (National Taiwan University/ASML Holding N.V.) Kuen-Yu Tsai;Alek C. Chen;Jia-Han Li; Kuen-Yu Tsai; Alek C. Chen; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:33Z Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:32Z Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects Philip C. W. Ng; Kuen-Yu Tsai; Yen-Min Lee; Fu-Min Wang; Jia-Han Li; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:26Z Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write Fu-Min Wang;Kuen-Yu Tsai;Jia-Han Li;Alek C. Chen;Yen-Min Lee;Yu-Tian Shen;Hsin-Hung Cheng;Chieh-Hsiang Kuan; Fu-Min Wang; Kuen-Yu Tsai; Jia-Han Li; Alek C. Chen; Yen-Min Lee; Yu-Tian Shen; Hsin-Hung Cheng; Chieh-Hsiang Kuan; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:26Z Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write Fu-Min Wang;Kuen-Yu Tsai;Jia-Han Li;Alek C. Chen;Yen-Min Lee;Yu-Tian Shen;Hsin-Hung Cheng;Chieh-Hsiang Kuan; Fu-Min Wang; Kuen-Yu Tsai; Jia-Han Li; Alek C. Chen; Yen-Min Lee; Yu-Tian Shen; Hsin-Hung Cheng; Chieh-Hsiang Kuan; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:26Z Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography system Yen-Min Lee;Jia-Han Li;Sheng-Yung Chen;Shiau-Yi Ma;Kuen-Yu Tsai;Tony W. H. Sheu;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; Tony W. H. Sheu; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:26Z Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography system Yen-Min Lee;Jia-Han Li;Sheng-Yung Chen;Shiau-Yi Ma;Kuen-Yu Tsai;Tony W. H. Sheu;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; Tony W. H. Sheu; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:25Z High spatial resolution and large field intensity by a set of two modified zone plates Zhan-Yu Liu;Yao-Jen Tsai;Jia-Han Li;Kuen-Yu Tsai; Zhan-Yu Liu; Yao-Jen Tsai; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:25Z High spatial resolution and large field intensity by a set of two modified zone plates Zhan-Yu Liu;Yao-Jen Tsai;Jia-Han Li;Kuen-Yu Tsai; Zhan-Yu Liu; Yao-Jen Tsai; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:21Z Stochastic simulation of photon scattering for EUV mask defect inspection Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:21Z Stochastic simulation of photon scattering for EUV mask defect inspection Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:20Z Fresnel zone plate manufacturability analysis for direct-write lithography by simulating focusing and patterning performance versus fabrication errors Kuen-Yu Tsai; Sheng-Yung Chen; Ting-Han Pei; Jia-Han Li; KUEN-YU TSAI; Kuen-Yu Tsai;Sheng-Yung Chen;Ting-Han Pei;Jia-Han Li
臺大學術典藏 2018-09-10T08:18:20Z Fresnel zone plate manufacturability analysis for direct-write lithography by simulating focusing and patterning performance versus fabrication errors Kuen-Yu Tsai; Sheng-Yung Chen; Ting-Han Pei; Jia-Han Li; KUEN-YU TSAI; Kuen-Yu Tsai;Sheng-Yung Chen;Ting-Han Pei;Jia-Han Li
臺大學術典藏 2018-09-10T08:18:20Z Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method Yen-Min Lee;Jia-Han Li;Philip C. W. Ng;Ting-Hang Pei;Fu-Min Wang;Kuen-Yu Tsai;Alek C. Chen; Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Hang Pei; Fu-Min Wang; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:20Z Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method Yen-Min Lee;Jia-Han Li;Philip C. W. Ng;Ting-Hang Pei;Fu-Min Wang;Kuen-Yu Tsai;Alek C. Chen; Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Hang Pei; Fu-Min Wang; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T07:42:07Z Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method Yen-Min Lee;Jia-Han Li;Philip C. W. Ng;Ting-Han Pei;Fu-Min Wang;Kuen-Yu Tsai;Alek C. Chen; Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Han Pei; Fu-Min Wang; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T07:42:07Z Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method Yen-Min Lee;Jia-Han Li;Philip C. W. Ng;Ting-Han Pei;Fu-Min Wang;Kuen-Yu Tsai;Alek C. Chen; Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Han Pei; Fu-Min Wang; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T07:42:06Z Effects of Fresnel zone plate fabrication errors on focusing performances Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T07:42:06Z Effects of Fresnel zone plate fabrication errors on focusing performances Ting-Hang Pei;Kuen-Yu Tsai;Jia-Han Li; Ting-Hang Pei; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T07:42:06Z A fully model-based methodology for simultaneously correcting EUV mask shadowing and optical proximity effects with improved pattern transfer fidelity and process windows Philip C. W. Ng;Kuen-Yu Tsai;Yen-Min Lee;Ting-Han Pei;Fu-Min Wang;Jia-Han Li;Alek C. Chen; Philip C. W. Ng; Kuen-Yu Tsai; Yen-Min Lee; Ting-Han Pei; Fu-Min Wang; Jia-Han Li; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T07:42:06Z A fully model-based methodology for simultaneously correcting EUV mask shadowing and optical proximity effects with improved pattern transfer fidelity and process windows Philip C. W. Ng;Kuen-Yu Tsai;Yen-Min Lee;Ting-Han Pei;Fu-Min Wang;Jia-Han Li;Alek C. Chen; Philip C. W. Ng; Kuen-Yu Tsai; Yen-Min Lee; Ting-Han Pei; Fu-Min Wang; Jia-Han Li; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018 Effects of band shifting on permittivity of plasmonic material Chiu, M.-H.; Li, J.-H.; JIA-HAN LI

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