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Showing items 226-250 of 280  (12 Page(s) Totally)
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Institution Date Title Author
臺大學術典藏 2018-09-10T15:00:24Z Refractive index and effective thickness measurement system for the RGB color filter coatings with absorption and scattering properties Yen-Min Lee;Hsin-Hung Cheng;Jia-Han Li;Kuen-Yu Tsai;Yu-Tian Sheng; Yen-Min Lee; Hsin-Hung Cheng; Jia-Han Li; Kuen-Yu Tsai; Yu-Tian Sheng; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises Yen-Min Lee;Jia-Han Li;Fu-Min Wang;Hsin-Hung Cheng;Yu-Tian Shen;Kuen-Yu Tsai;Jason Shieh;Alek Chen; Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Jason Shieh; Alek Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises Yen-Min Lee;Jia-Han Li;Fu-Min Wang;Hsin-Hung Cheng;Yu-Tian Shen;Kuen-Yu Tsai;Jason Shieh;Alek Chen; Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Jason Shieh; Alek Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts Yi-Yeh Yang;Hsuan-Ping Lee;Chun-Hung Liu;Hao-Yun Yu;Kuen-Yu Tsai;Jia-Han Li; Yi-Yeh Yang; Hsuan-Ping Lee; Chun-Hung Liu; Hao-Yun Yu; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts Yi-Yeh Yang;Hsuan-Ping Lee;Chun-Hung Liu;Hao-Yun Yu;Kuen-Yu Tsai;Jia-Han Li; Yi-Yeh Yang; Hsuan-Ping Lee; Chun-Hung Liu; Hao-Yun Yu; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z A New EUV Mask Blank Defect Inspection Method with Coherent Diffraction Imaging Ding Qi;Kuen-Yu Tsai;Jia-Han Li; Ding Qi; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T15:00:24Z A New EUV Mask Blank Defect Inspection Method with Coherent Diffraction Imaging Ding Qi;Kuen-Yu Tsai;Jia-Han Li; Ding Qi; Kuen-Yu Tsai; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:34Z Void-based photonic crystal mirror with high-reflectivity and low-dissipation for extreme-ultraviolet radiation Yen-Min Lee;Jia-Han Li;Kuen-Yu Tsai; Yen-Min Lee; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:34Z Void-based photonic crystal mirror with high-reflectivity and low-dissipation for extreme-ultraviolet radiation Yen-Min Lee;Jia-Han Li;Kuen-Yu Tsai; Yen-Min Lee; Jia-Han Li; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:34Z Direct-scatterometry-enabled optical-proximity-correction-model calibration Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:50:34Z Direct-scatterometry-enabled optical-proximity-correction-model calibration Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Direct-scatterometry-enabled lithography model calibration Chih-Yu Chen;Kuen-Yu Tsai;Yu-Tian Shen;Yen-Min Lee;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Kuen-Yu Tsai; Yu-Tian Shen; Yen-Min Lee; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Direct-scatterometry-enabled lithography model calibration Chih-Yu Chen;Kuen-Yu Tsai;Yu-Tian Shen;Yen-Min Lee;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Kuen-Yu Tsai; Yu-Tian Shen; Yen-Min Lee; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example Yen-Min Lee;Jia-Han Li;Tony Wen-Hann Sheu;Kuen-Yu Tsai;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T09:25:00Z Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example Yen-Min Lee;Jia-Han Li;Tony Wen-Hann Sheu;Kuen-Yu Tsai;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:35Z Multilayer Mirror Structure Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:35Z Multilayer Mirror Structure Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:34Z Method for Calibrating A Manufacturing Process Model (National Taiwan University/ASML Holding N.V.) Kuen-Yu Tsai;Alek C. Chen;Jia-Han Li; Kuen-Yu Tsai; Alek C. Chen; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:34Z Method for Calibrating A Manufacturing Process Model (National Taiwan University/ASML Holding N.V.) Kuen-Yu Tsai;Alek C. Chen;Jia-Han Li; Kuen-Yu Tsai; Alek C. Chen; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:33Z Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:46:32Z Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects Philip C. W. Ng; Kuen-Yu Tsai; Yen-Min Lee; Fu-Min Wang; Jia-Han Li; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:26Z Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write Fu-Min Wang;Kuen-Yu Tsai;Jia-Han Li;Alek C. Chen;Yen-Min Lee;Yu-Tian Shen;Hsin-Hung Cheng;Chieh-Hsiang Kuan; Fu-Min Wang; Kuen-Yu Tsai; Jia-Han Li; Alek C. Chen; Yen-Min Lee; Yu-Tian Shen; Hsin-Hung Cheng; Chieh-Hsiang Kuan; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:26Z Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write Fu-Min Wang;Kuen-Yu Tsai;Jia-Han Li;Alek C. Chen;Yen-Min Lee;Yu-Tian Shen;Hsin-Hung Cheng;Chieh-Hsiang Kuan; Fu-Min Wang; Kuen-Yu Tsai; Jia-Han Li; Alek C. Chen; Yen-Min Lee; Yu-Tian Shen; Hsin-Hung Cheng; Chieh-Hsiang Kuan; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:26Z Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography system Yen-Min Lee;Jia-Han Li;Sheng-Yung Chen;Shiau-Yi Ma;Kuen-Yu Tsai;Tony W. H. Sheu;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; Tony W. H. Sheu; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏 2018-09-10T08:18:26Z Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography system Yen-Min Lee;Jia-Han Li;Sheng-Yung Chen;Shiau-Yi Ma;Kuen-Yu Tsai;Tony W. H. Sheu;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Sheng-Yung Chen; Shiau-Yi Ma; Kuen-Yu Tsai; Tony W. H. Sheu; Jia-Yush Yen; KUEN-YU TSAI

Showing items 226-250 of 280  (12 Page(s) Totally)
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