臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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機構	日期	題名	作者
臺大學術典藏	2018-09-10T09:50:34Z	Direct-scatterometry-enabled optical-proximity-correction-model calibration	Chih-Yu Chen;Philip C. W. Ng;Chun-Hung Liu;Yu-Tian Shen;Kuen-Yu Tsai;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Philip C. W. Ng; Chun-Hung Liu; Yu-Tian Shen; Kuen-Yu Tsai; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:25:00Z	Direct-scatterometry-enabled lithography model calibration	Chih-Yu Chen;Kuen-Yu Tsai;Yu-Tian Shen;Yen-Min Lee;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Kuen-Yu Tsai; Yu-Tian Shen; Yen-Min Lee; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:25:00Z	Direct-scatterometry-enabled lithography model calibration	Chih-Yu Chen;Kuen-Yu Tsai;Yu-Tian Shen;Yen-Min Lee;Jia-Han Li;Jason J. Shieh;Alek C. Chen; Chih-Yu Chen; Kuen-Yu Tsai; Yu-Tian Shen; Yen-Min Lee; Jia-Han Li; Jason J. Shieh; Alek C. Chen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:25:00Z	Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example	Yen-Min Lee;Jia-Han Li;Tony Wen-Hann Sheu;Kuen-Yu Tsai;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T09:25:00Z	Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example	Yen-Min Lee;Jia-Han Li;Tony Wen-Hann Sheu;Kuen-Yu Tsai;Jia-Yush Yen; Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI
臺大學術典藏	2018-09-10T08:46:35Z	Multilayer Mirror Structure	Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T08:46:35Z	Multilayer Mirror Structure	Jia-Han Li;Yen-Min Lee;Kuen-Yu Tsai; Jia-Han Li; Yen-Min Lee; Kuen-Yu Tsai; KUEN-YU TSAI
臺大學術典藏	2018-09-10T08:46:34Z	Method for Calibrating A Manufacturing Process Model (National Taiwan University/ASML Holding N.V.)	Kuen-Yu Tsai;Alek C. Chen;Jia-Han Li; Kuen-Yu Tsai; Alek C. Chen; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T08:46:34Z	Method for Calibrating A Manufacturing Process Model (National Taiwan University/ASML Holding N.V.)	Kuen-Yu Tsai;Alek C. Chen;Jia-Han Li; Kuen-Yu Tsai; Alek C. Chen; Jia-Han Li; KUEN-YU TSAI
臺大學術典藏	2018-09-10T08:46:33Z	Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images	Yen-Min Lee; Jia-Han Li; Fu-Min Wang; Hsin-Hung Cheng; Yu-Tian Shen; Kuen-Yu Tsai; Alek C. Chen; KUEN-YU TSAI

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