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Institution Date Title Author
國立交通大學 2014-12-12T02:30:01Z 多層導體連線銅電鍍與電拋光製程之研究 張世杰; Shih-Chieh Chang; 馮明憲; 戴寶通; 謝嘉民; Ming-Shiann Feng; Bau-Tung Dai; Jia-Ming Shieh
國立交通大學 2014-12-12T02:24:48Z 低介電常數材料氟化非晶系碳膜蝕刻特性研究 吳育恆; Wu Yu-Hen; 吳耀銓; 謝嘉民; 馮明憲; Yew-Chung, sermon, Wu; Jia-Ming Shieh; Ming-Shiann Feng
中原大學 2000 Plasma Treatment and Dry Etch Characteristics of Organic Low-k Dielectrics Ta-Chin Wei;Chi-Hung Liu;Jia-Ming Shieh;Shich-Chang Suen;Bau-Tong Dai

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