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"jia yush yen wen sheng fan"
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| 臺大學術典藏 |
2020-01-13T08:20:47Z |
Compensation of the residual error from the charge feedback control of a piezoelectric-actuated stage
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Jia-Yush Yen Wen, Sheng-Fan;Yen, Jia-Yush;Liu, Shih-Tang;Wang, Fu-Cheng;Chen, Min-Shin;Chen, Yung-Yaw;Hung, Chung-Wen; Wen, Sheng-Fan; Yen, Jia-Yush; Liu, Shih-Tang; Wang, Fu-Cheng; Chen, Min-Shin; Chen, Yung-Yaw; Hung, Chung-Wen; JIA-YUSH YEN |
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