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机构 日期 题名 作者
國立交通大學 2014-12-08T15:05:05Z GROWTH OF SINGLE-CRYSTALLINE COSI2 ON (111)SI AT LOW ANNEALING TEMPERATURES BY A NONULTRAHIGH VACUUM METHOD CHENG, HC; JUANG, MH
國立交通大學 2014-12-08T15:05:00Z EFFECTS OF RAPID THERMAL ANNEALING ON THE FORMATION OF SHALLOW P+N JUNCTION BY IMPLANTING BF2+ IONS INTO THIN METAL-FILMS ON SI SUBSTRATE .1. THIN TITANIUM FILMS JUANG, MH; CHENG, HC
國立交通大學 2014-12-08T15:05:00Z EFFECTS OF RAPID THERMAL ANNEALING ON THE FORMATION OF SHALLOW P+N JUNCTION BY IMPLANTING BF2+ IONS INTO THIN METAL-FILMS ON SI SUBSTRATE .2. THIN COBALT FILMS JUANG, MH; CHENG, HC
國立交通大學 2014-12-08T15:04:57Z THE REVERSE ANNEAL OF JUNCTION CHARACTERISTICS IN FORMING SHALLOW P+-N JUNCTION BY BF-2(+) IMPLANTATION INTO THIN CO FILMS ON SI SUBSTRATE JUANG, MH; CHENG, HC
國立交通大學 2014-12-08T15:04:57Z NOVEL ANNEALING SCHEME FOR FABRICATING HIGH-QUALITY TI-SILICIDED SHALLOW N+P JUNCTION BY P+ IMPLANTATION INTO THIN TI FILMS ON SI SUBSTRATE JUANG, MH; CHENG, HC
國立交通大學 2014-12-08T15:04:57Z INFLUENCE OF IMPLANT CONDITION ON THE TRANSIENT-ENHANCED DIFFUSION OF ION-IMPLANTED BORON IN SILICON JUANG, MH; WAN, FS; LIU, HW; CHENG, KL; CHENG, HC
國立交通大學 2014-12-08T15:04:56Z SUPPRESSION OF ANOMALOUS DIFFUSION OF ION-IMPLANTED BORON IN SILICON BY LASER PROCESSING JUANG, MH; WAN, FS; LIU, HW; CHENG, KL; CHENG, HC
國立交通大學 2014-12-08T15:04:56Z FORMATION OF SHALLOW P+N JUNCTIONS BY IMPLANTING BF2+ IONS INTO THIN COBALT FILMS ON SILICON SUBSTRATES JUANG, MH; CHENG, HC
國立交通大學 2014-12-08T15:04:55Z FORMATION OF P(+)N JUNCTIONS BY SI(+)+B(+) IMPLANTATION AND LASER ANNEALING JUANG, MH; CHENG, HC
國立交通大學 2014-12-08T15:04:51Z NOVEL EFFECTS OF HEATING RATE ON THE ACTIVATION RECRYSTALLIZATION OF BORON-IMPLANTED SI SUBSTRATES JUANG, MH; CHENG, HC
國立交通大學 2014-12-08T15:04:50Z FILM THICKNESS EFFECT ON THE EPITAXIAL-GROWTH OF COSI2 ON SI(111) JUANG, MH; CHENG, HC
國立交通大學 2014-12-08T15:04:47Z CONVENTIONAL FURNACE AND RAPID THERMAL ANNEALING OF COBALT FILMS ON SI(111) JUANG, MH; CHENG, HC
國立交通大學 2014-12-08T15:04:46Z FORMATION OF SELF-ALIGNED TISI2 P+-N JUNCTIONS BY IMPLANTING BF2+ IONS THROUGH THIN TI OR SIO2 FILM ON SI SUBSTRATE RAPID THERMAL ANNEALING JUANG, MH; CHENG, HC
國立交通大學 2014-12-08T15:04:46Z CHARACTERIZATION OF SILICIDED SHALLOW N+P JUNCTIONS FORMED BY P+ IMPLANTATION INTO THIN TI FILMS ON SI SUBSTRATES JUANG, MH; CHENG, HC
國立交通大學 2014-12-08T15:04:43Z ACTIVATION MECHANISM OF IMPLANTED BORON IN A SI SUBSTRATE JUANG, MH; CHENG, HC
國立交通大學 2014-12-08T15:04:40Z SHALLOW N(+)P JUNCTION FORMATION BY IMPLANTING P+ IONS INTO THIN CO FILMS AND LASER PROCESSING CHENG, HC; JUANG, MH
國立交通大學 2014-12-08T15:04:34Z FORMATION OF EXCELLENT SHALLOW N+P JUNCTIONS BY AS+ IMPLANTATION INTO THIN COSI FILMS ON SI SUBSTRATE LIN, CT; JUANG, MH; CHU, CH; CHENG, HC
國立交通大學 2014-12-08T15:04:24Z THE PROCESS LIMITATION FOR FORMING TI SILICIDED SHALLOW JUNCTION BY BF(2)+ IMPLANTATION INTO THIN POLYCRYSTALLINE SI FILMS AND SUBSEQUENT TI SILICIDATION JUANG, MH; LIN, CT; JAN, ST; CHENG, HC
國立交通大學 2014-12-08T15:04:21Z NOVEL PHENOMENON OF THE AL-1 WT-PERCENT-SI CONTACTS ON THE NF3/AR POST-ETCHING-TREATED N-SI SUBSTRATES CHENG, HC; CHEN, YE; JUANG, MH; YEN, PW; LIN, L
國立交通大學 2014-12-08T15:03:52Z SHALLOW JUNCTIONS FORMED BY BF2+ IMPLANTATION INTO THIN COSI FILMS AND RAPID THERMAL ANNEALING JUANG, MH; LIN, CT; CHENG, HC
國立交通大學 2014-12-08T15:03:48Z A SILICIDATION-INDUCED PROCESS CONSIDERATION FOR FORMING SCALE-DOWN SILICIDED JUNCTION CHENG, HC; JUANG, MH; LIN, CT; HUANG, LM
國立交通大學 2014-12-08T15:03:46Z FORMATION OF SHALLOW P(+)N JUNCTIONS BY BF2+ IMPLANTATION INTO THIN POLYCRYSTALLINE SI FILMS LIN, CT; JUANG, MH; JAN, ST; CHOU, PF; CHENG, HC
國立交通大學 2014-12-08T15:03:35Z SILICIDE-CAUSED ANOMALOUS REVERSE CURRENT-VOLTAGE CHARACTERISTICS OF COSI2 SHALLOW P(+)N JUNCTIONS JUANG, MH; LIN, CT; CHENG, HC
國立交通大學 2014-12-08T15:03:30Z EFFECTS OF COBALT SILICIDATION ON THE ELECTRICAL CHARACTERISTICS OF SHALLOW P(+)N JUNCTIONS FORMED BY BF2+ IMPLANTATION INTO THIN POLYCRYSTALLINE SI FILMS LIN, CT; CHAO, CH; JUANG, MH; JAN, ST; CHOU, PF; CHENG, HC

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