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Institution Date Title Author
國立交通大學 2014-12-12T02:18:10Z 在化學機械研磨製程中機械性質之探討與分析 康立杰; Kang, Lee-Chieh; 秦繼華; Chin, Jih-Hua
國立成功大學 1999-05 A comparative study on the roles of velocity in the material removal rate during chemical mechanical polishing Tseng, Wei-Tsu; Chin, Jyh-Hwa; Kang, Lee-Chieh

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