臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立交通大學	2014-12-08T15:19:21Z	Direct quantitative analysis of phthalate esters as micro-contaminants in cleanroom air and wafer surfaces by auto-thermal desorption-gas chromatography-mass spectrometry	Kang, YH; Den, W; Bai, HL; Ko, FH
國立交通大學	2014-12-08T15:17:51Z	Organic airborne molecular contamination in semiconductor fabrication clean rooms - A review	Den, W; Bai, HL; Kang, YH
國立交通大學	2014-12-08T15:17:22Z	Short time deposition kinetics of diethyl phthalate and dibutyl phthalate on a silicon wafer surface	Kang, YH; Den, W; Bai, HL

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