臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立臺灣科技大學	2020	Advanced chemical-mechanical planarization for 4H-SiC substrate by water-soluble inclusion complexes of fullerene	Tsai, Y.-H.;Chen, Chen C.-C.A.;Suzuki, K.;Khajornrungruang, P.;Chiu, S.-F.;Hua, C.-T.
國立臺灣科技大學	2015	Study on evaluation method for polishing pad surface topography based on optical fourier transform	Khajornrungruang, P.;Suzuki, K.;Kushida, T.;Tajiri, Tajiri T.;Matsuo, H.;Mochizuki, Y.;Hiyama, Hiyama H.;Kimura, Kimura K.

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