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"ku k c nieh c f gong j huang l"
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| 東海大學 |
2006 |
Effects of germanium and carbon coimplants on phosphorus diffusion in silicon
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Ku, K.C.?,?Nieh, C.F.,?Gong, J.,?Huang, L.P.,?Sheu, Y.M.,?Wang, C.C.,?Chen, C.H.,?Chang, H.,?Wang, L.T.,?Lee, T.L.,?Chen, S.C.,?Liang, M.S. |
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