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國立成功大學 |
2012 |
Electrochemical Studies of W Corrosion for Low Resistive Contact in the 28 nm Technology Node
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Hsu, Chia-Lin; Perng, Dung-Ching; Chen, Yen-Ming; Huang, Shu-Min; Li, Yu-Ting; Kung, Chang-Hung; Lin, Chih-Hsun; Yang, Yu-Ru; Lin, Chin-Fu; Huang, Climbing; Wu, J. Y. |
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