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| 國立成功大學 |
2004-01-30 |
Monitor and eliminate the circular defects in HDP-STI deposition through oxynitride/oxide composite liner
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Lan, Jin-Kun; Wang, Ying-Lang; Liu, Chuan-Pu; Lee, Wen-His; Ay, Chyung; Cheng, Yi-Lung; Chang, Shih-Chieh |
| 國立成功大學 |
2003-11-15 |
The application of electrochemical metrologies for investigating chemical mechanical polishing of Al with a Ti barrier layer
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Chiu, Shao-Yu; Wang, Ying-Lang; Liu, Chuan-Pu; Lan, Jin-Kun; Ay, Chyung; Feng, Ming-Shiann; Tsai, Ming-Shih; Dai, Bau-Tong |
| 國立成功大學 |
2003-09 |
Mechanisms of circular defects for shallow trench isolation oxide deposition
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Lan, Jin-Kun; Wang, Ying-Lang; Liu, Chuan-Pu; Chao, Chuen-Guang; Ay, Chyung; Liu, Chi-Wen; Cheng, Yi-Lung |
Showing items 1-3 of 3 (1 Page(s) Totally)
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