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國立成功大學 |
2008-04 |
Observation of reliability of HfZrOX gate dielectric devices with different Zr/Hf ratios
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Liao, Jing-Chyi; Fang, Yean-Kuen; Hou, Yong Tian; Tseng, Wei Hsiung; Yang, Chih I.; Hsu, Peng Fu; Chao, Yuen Shun; Lin, Kang Cheng; Huang, Kuo Tai; Lee, Tzu Liang; Liang, Meng Sung |
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