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教育部委託研究計畫      計畫執行:國立臺灣大學圖書館
 
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機構 日期 題名 作者
國立交通大學 2014-12-08T15:44:50Z Effects of NH3-plasma nitridation on the electrical characterizations of low-k hydrogen silsesquioxane with copper interconnects Liu, PT; Chang, TC; Yang, YL; Cheng, YF; Sze, SM
國立交通大學 2014-12-08T15:44:42Z Improvement of post-chemical mechanical planarization characteristics on organic low k methylsilsesquioxane as intermetal dielectric Liu, PT; Chang, TC; Huang, MC; Yang, YL; Mor, YS; Tsai, MS; Chung, H; Hou, J; Sze, SM
國立交通大學 2014-12-08T15:43:55Z Elimination of dielectric degradation for chemical-mechanical planarization of low-k hydrogen silisesquioxane Chang, TC; Liu, PT; Tsai, TM; Yeh, FS; Tseng, TY; Tsai, MS; Chen, BC; Yang, YL; Sze, SM
國立交通大學 2014-12-08T15:43:42Z Highly reliable chemical-mechanical polishing process for organic low-k methylsilsesquioxane Liu, PT; Chang, TC; Huang, MC; Tsai, MS; Sze, SM
國立交通大學 2014-12-08T15:43:16Z Enhancing the resistance of low-k hydrogen silsesquioxane (HSQ) to wet stripper damage Chang, TC; Mor, YS; Liu, PT; Tsai, TM; Chen, CW; Mei, YJ; Sze, SM
國立交通大學 2014-12-08T15:43:16Z The effect of ammonia plasma treatment on low-k methyl-hybrido-silsesquioxane against photoresist stripping damage Chang, TC; Mor, YS; Liu, PT; Tsai, TM; Chen, CW; Mei, YJ; Sze, SM
國立交通大學 2014-12-08T15:43:16Z Improvement of low dielectric constant methylsilsesquioxane by boron implantation treatment Chang, TC; Mor, YS; Liu, PT; Tsai, TM; Chen, CW; Sze, SM; Mei, YJ
國立交通大學 2014-12-08T15:43:11Z Effectiveness of NH3 plasma treatment in preventing wet stripper damage to low-k hydrogen silsesquioxane (HSQ) Chang, TC; Mor, YS; Liu, PT; Tsai, TM; Chen, CW; Mei, YJ; Sze, SM
國立交通大學 2014-12-08T15:42:46Z Effective strategy for porous organosilicate to suppress oxygen ashing damage Liu, PT; Chang, TC; Mor, YS; Chen, CW; Tsai, TM; Chu, CJ; Pan, FM; Sze, SM
國立交通大學 2014-12-08T15:42:32Z Preventing dielectric damage of low-k organic siloxane by passivation treatment Chang, TC; Mor, YS; Liu, PT; Tsai, TM; Chen, CW; Mei, YJ; Pan, FM; Wu, WF; Sze, SM
國立交通大學 2014-12-08T15:42:17Z Reliability of laser-activated low-temperature polycrystalline silicon thin-film transistors Peng, DZ; Chang, TC; Zan, HW; Huang, TY; Chang, CY; Liu, PT
國立交通大學 2014-12-08T15:42:15Z Eliminating dielectric degradation of low-k organosilicate glass by trimethylchlorosilane treatment Chang, TC; Liu, PT; Mor, YS; Tsai, TM; Chen, CW; Mei, YJ; Pan, FM; Wu, WF; Sze, SM
國立交通大學 2014-12-08T15:42:14Z Effective repair to ultra-low-k dielectric material (k-2.0) by hexamethyidisilazane treatment Mor, YS; Chang, TC; Liu, PT; Tsai, TM; Chen, CW; Yan, ST; Chu, CJ; Wu, WF; Pan, FM; Lur, W; Sze, SM
國立交通大學 2014-12-08T15:42:13Z Characterization of porous silicate for ultra-low k dielectric application Liu, PT; Chang, TC; Hsu, KC; Tseng, TY; Chen, LM; Wang, CJ; Sze, SM
國立交通大學 2014-12-08T15:42:08Z Recovering dielectric loss of low dielectric constant organic siloxane during the photoresist removal process Chang, TC; Mor, YS; Liu, PT; Tsai, TM; Chen, CW; Mei, YJ; Sze, SM
國立交通大學 2014-12-08T15:41:56Z A W-spacer GOLD TFT with high performance and high reliability Zan, HW; Peng, DZ; Shih, PS; Chang, TC; Liu, PT; Chang, CY
國立交通大學 2014-12-08T15:41:53Z Trimethylchlorosilane treatment of ultralow dielectric constant material after photoresist removal processing Chang, TC; Mor, YS; Liu, PT; Tsai, TM; Chen, CW; Chu, CJ; Pan, FM; Lur, W; Sze, SM
國立交通大學 2014-12-08T15:41:39Z Electrical properties of metal-ferroelectric-insulator-semiconductor using sol-gel derived SrBi2Ta2O9 film and ultra-thin Si3N4 buffer layer Huang, CH; Tseng, TY; Chien, CH; Yang, MJ; Leu, CC; Chang, TC; Liu, PT; Huang, TY
國立交通大學 2014-12-08T15:41:39Z The novel pattern method of low-k hybrid-organic-siloxane-polymer film using X-ray exposure Chang, TC; Tsai, TM; Liu, PT; Mor, YS; Chen, CW; Mei, YJ; Sheu, JT; Tseng, TY
國立交通大學 2014-12-08T15:41:38Z Polycrystalline silicon thin-film transistor with self-aligned SiGe raised source/drain Peng, DZ; Chang, TC; Shih, PS; Zan, HW; Huang, TY; Chang, CY; Liu, PT
國立交通大學 2014-12-08T15:41:21Z Electrical transport phenomena in aromatic hydrocarbon polymer Liu, PT; Chang, TC; Yan, ST; Li, CH; Sze, SM
國立交通大學 2014-12-08T15:41:18Z Characteristics and stress-induced degradation of laser-activated low temperature polycrystalline silicon thin-film transistors Peng, DZ; Chang, TC; Chang, CY; Tsai, ML; Tu, CH; Liu, PT
國立交通大學 2014-12-08T15:41:14Z A novel SiGe raised source/drain polycrystalline silicon thin-film transistor with improved on-current and larger breakdown voltage Peng, DZ; Chang, TC; Liu, CF; Yeh, PH; Liu, PT; Chang, CY
國立交通大學 2014-12-08T15:41:07Z Moisture-induced material instability of porous organosilicate glass Chang, TC; Chen, CW; Liu, PT; Mor, YS; Tsai, HM; Tsai, TM; Yan, ST; Tu, CH; Tseng, TY; Sze, SM
國立交通大學 2014-12-08T15:40:54Z Direct Patterning of low-k hydrogen silsesquioxane using X-ray exposure technology Chang, TC; Tsai, TM; Liu, PT; Mor, YS; Chen, CW; Sheu, JT; Tsengb, TY

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