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Institution Date Title Author
大葉大學 2016-04 Effect of DC input power and nitrogen ratio on the deposition of Ti1-xAlxN thin films using high power impulse magnetron sputtering technique Wu, Wan-Yu;Su, Amei;Liu, Yawei;Yeh, Chi-Ming;Chen, Wei-Chih;Chang, Chi-Lung
大葉大學 2015-11-15 High Power Impulse Magnetron Sputter Deposition: TiN and TiAlN Thin Films Shih, Siao-Gu;Su, Amei;Liu, Yawei;Chen, Pin-Hung;Chen, Wei-Chih;Chang, Chi-Lung;Wu, Wan-Yu
大葉大學 2015-10-12 Current-Voltage Characteristics and Deposition of TiAlN Thin Films by High Power Impulse Magnetron Sputtering Process Su, Amei;Liu, Yawei;Yeh, Chi-Ming;Chen, Wei-Chih;Chang, Chi-Lung;Wu, Wan-Yu

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