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Institution	Date	Title	Author
國立交通大學	2014-12-12T02:09:48Z	以CF□/CHF□/O□或CF□/NF□/O□對二氧化矽與經離子佈植的多晶矽之乾式蝕刻	劉岳良; LIU, YUE-LIANG; 龍文安; LONG, WEN-AN

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