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教育部委託研究計畫      計畫執行:國立臺灣大學圖書館
 
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機構 日期 題名 作者
國立交通大學 2014-12-08T15:27:08Z Studies of nitride- and oxide-based materials as absorptive shifters for embedded attenuated phase-shifting mask in 193 nm Lin, CM; Chang, KW; Lee, MD; Loong, WA
國立交通大學 2014-12-08T15:17:19Z Modified reflectance-transmittance method for the metrology of thin film optical properties Yeh, KT; Lin, CH; Hu, JR; Loong, WA
國立交通大學 2014-12-08T15:17:01Z Simulations of mask error enhancement factor in 193nm immersion lithography Yeh, KT; Loong, WA
國立交通大學 2014-12-08T15:05:51Z POLY(FORMYLOXYSTYRENE) AS LIFT-OFF RESIST LOONG, WA; HONG, WM
國立交通大學 2014-12-08T15:05:43Z PHOTOACID CATALYZED PHOTO-FRIES REARRANGEMENTS OF POLY(PARA-FORMYLOXYSTYRENE) AND FORMYLOXYNOVOLAC LOONG, WA; CHEN, RH
國立交通大學 2014-12-08T15:05:25Z A DIRECT APPROACH TO THE MODELING OF POLYDIHEXYLSILANE AS A CONTRAST ENHANCEMENT MATERIAL LOONG, WA; PAN, HT
國立交通大學 2014-12-08T15:05:19Z ENHANCED OXYGEN REACTIVE ION ETCHING RESISTANCE OF DIAZONAPHTHOQUINONE-POLY (FORMYLOXYSTYRENE) RESIST SYSTEM BY PHOTOACID CATALYZED PHOTO-FRIES REARRANGEMENT AND POTASSIUM-ION TREATMENT IN AQUEOUS-SOLUTION LOONG, WA; SU, AN
國立交通大學 2014-12-08T15:05:19Z THE MODELING AND SIMULATION OF NONLINEAR PHOTOBLEACHING MATERIALS LOONG, WA; PAN, HT
國立交通大學 2014-12-08T15:05:18Z ENHANCEMENT OF CF4 AND O2 REACTIVE ION ETCHING RESISTANCE OF POLY(BUTENE-1 SULFONE) BY N2 PLASMA PRETREATMENT LOONG, WA; CHANG, HW
國立交通大學 2014-12-08T15:05:18Z KEV ION-BEAM-EXPOSED POLY(METHYLISOPROPENYLKETONE) AND POLY(PHENYLISOPROPENYLKETONE) LOONG, WA; PENG, NT
國立交通大學 2014-12-08T15:05:16Z PHOTOACID CATALYZED MAIN CHAIN SCISSION OF POLY(BUTENE-1 SULFONE) AS A DEEP UV POSITIVE RESIST LOONG, WA; CHANG, HW
國立交通大學 2014-12-08T15:05:13Z ENHANCED OXYGEN PLASMA STRIPPING OF P+-IMPLANTED NEGATIVE RESIST BY HYDROGEN PLASMA PRETREATMENT - TEMPERATURE EFFECTS LOONG, WA; YEN, MS
國立交通大學 2014-12-08T15:05:12Z OXIDATION OF GAAS SURFACE BY OXYGEN PLASMA AND ITS APPLICATION AS AN ANTIREFLECTION LAYER LOONG, WA; CHANG, HL
國立交通大學 2014-12-08T15:05:10Z PROCESSES OF TOP-IMAGED SINGLE-LAYER RESISTS BY POTASSIUM-ION TREATMENT IN SOLUTION LOONG, WA; SU, AN; WANG, JL; CHU, CY
國立交通大學 2014-12-08T15:05:10Z THE SIMULATION OF CONTRAST-ENHANCED LITHOGRAPHY LOONG, WA; PAN, HT
國立交通大學 2014-12-08T15:05:05Z TITANIUM MONONITRIDE AS AN ANTIREFLECTION LAYER ON ALUMINUM METALLIZATION FOR SUBMICRON PHOTOLITHOGRAPHIC PATTERNING LOONG, WA; CHIU, KD
國立交通大學 2014-12-08T15:04:50Z POLY(DIMETHYL-CO-DIPHENYLSILANE) AS A DEEP-UV AND AN OXYGEN PLASMA PORTABLE CONFORMABLE MASK LOONG, WA; WANG, TH
國立交通大學 2014-12-08T15:04:35Z ENHANCED O2 PLASMA STRIPPING OF P+ AND SI+ IMPLANTED NEGATIVE RESIST BY H2 PLASMA PRETREATMENT LOONG, WA; YEN, MS; WANG, FC; HSU, BY; LIU, YL
國立交通大學 2014-12-08T15:04:14Z CROSS SHAPED PATTERN ON CHROME MASK FOR 0.5 MU-M CONTACT HOLE FABRICATION LOONG, WA; SHY, SL; GUO, GC; YANG, MT; SU, SY
國立交通大學 2014-12-08T15:03:33Z 0.35-MU-M PATTERN FABRICATION USING QUARTZ-ETCH ATTENUATE PHASE-SHIFTING MASK IN AN I-LINE STEPPER WITH A 0.50-NA AND A 0.60-SIGMA LOONG, WA; SHY, SL; LIN, YC
國立交通大學 2014-12-08T15:02:59Z TiNx as a new embedded material for attenuated phase shift mask Loong, WA; Chen, TC; Tseng, JC
國立交通大學 2014-12-08T15:02:03Z Study on optimization of annular off-axis illumination using Taguchi method for 0.35 mu m dense line/space Loong, WA; Tseng, JC; Chen, TC; Lung, CA

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