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Institution Date Title Author
臺大學術典藏 2020-06-11T06:46:02Z Abbe-PCA-SMO: Microlithography source and mask optimization based on Abbe-PCA Chang, S.-J.;Chen, C.C.P.;Melvin III, L.S.; Chang, S.-J.; Chen, C.C.P.; Melvin III, L.S.; CHUNG-PING CHEN
臺大學術典藏 2020-06-11T06:46:02Z Abbe-PCA-SMO: Microlithography source and mask optimization based on Abbe-PCA Chang, S.-J.;Chen, C.C.P.;Melvin III, L.S.; Chang, S.-J.; Chen, C.C.P.; Melvin III, L.S.; CHUNG-PING CHEN
臺大學術典藏 2020-06-11T06:46:02Z Hierarchical kernel generation for SMO application Chang, J.H.-C.;Chen, C.C.-P.;Melvin III, L.S.; Chang, J.H.-C.; Chen, C.C.-P.; Melvin III, L.S.; CHUNG-PING CHEN
臺大學術典藏 2020-06-11T06:46:02Z Hierarchical kernel generation for SMO application Chang, J.H.-C.;Chen, C.C.-P.;Melvin III, L.S.; Chang, J.H.-C.; Chen, C.C.-P.; Melvin III, L.S.; CHUNG-PING CHEN
臺大學術典藏 2020-06-11T06:46:02Z Abbe-PCA (Abbe-Hopkins): Microlithography aerial image analytical compact kernel generation based on principle component analysis Tsai, M.-F.;Chang, S.-J.;Chen, C.C.P.;Melvin III, L.S.; Tsai, M.-F.; Chang, S.-J.; Chen, C.C.P.; Melvin III, L.S.; CHUNG-PING CHEN
臺大學術典藏 2020-06-11T06:46:02Z Abbe-PCA (Abbe-Hopkins): Microlithography aerial image analytical compact kernel generation based on principle component analysis Tsai, M.-F.;Chang, S.-J.;Chen, C.C.P.;Melvin III, L.S.; Tsai, M.-F.; Chang, S.-J.; Chen, C.C.P.; Melvin III, L.S.; CHUNG-PING CHEN

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